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Journal of the Korean Ceramic Society
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Author :
Jong-Chae Kim
2 Articles
871
Effect of Dopants on Cobalt Silicidation Behavior at Metal-oxide-semiconductor Field-effect Transistor Sidewall Spacer Edge
Jong-Chae Kim, Yeong-Cheol Kim, Byung-Kook Kim
J. Korean Ceram. Soc.
2001;38(10):871
782
Effects of Ti and TiN Capping Layers on Cobalt-silicided MOS Device Characteristics in Embedded DRAM and Logic
Jong-Chae Kim, Yeong-Cheol Kim, Jun-Ho Choy
J. Korean Ceram. Soc.
2001;38(9):782
Materials Science, Ceramics - Q1
Journal Impact Factor 2.5